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"State/Model-Free Variable-Gain Discrete Sliding Mode Control for an ..."

Min Li et al. (2017)

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DOI: 10.1109/TIE.2016.2645893

access: closed

type: Journal Article

metadata version: 2020-11-04

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Min Li, Kaiming Yang, Yu Zhu, Haihua Mu, Chuxiong Hu:
State/Model-Free Variable-Gain Discrete Sliding Mode Control for an Ultraprecision Wafer Stage. IEEE Trans. Ind. Electron. 64(8): 6695-6705 (2017)

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