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"A Novel Piezoactuated XY Stage With Parallel, Decoupled, and Stacked ..."

Yangmin Li, Qingsong Xu (2011)

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DOI: 10.1109/TIE.2010.2084972

access: closed

type: Journal Article

metadata version: 2020-06-10

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Yangmin Li, Qingsong Xu:
A Novel Piezoactuated XY Stage With Parallel, Decoupled, and Stacked Flexure Structure for Micro-/Nanopositioning. IEEE Trans. Ind. Electron. 58(8): 3601-3615 (2011)

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