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"Dual-Loop Iterative Learning Control With Application to an Ultraprecision ..."

Min Li et al. (2022)

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DOI: 10.1109/TIE.2021.3120481

access: closed

type: Journal Article

metadata version: 2023-04-30

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Min Li, Taotao Chen, Rong Cheng, Kaiming Yang, Yu Zhu, Caohui Mao:
Dual-Loop Iterative Learning Control With Application to an Ultraprecision Wafer Stage. IEEE Trans. Ind. Electron. 69(11): 11590-11599 (2022)

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