"A New High-Power Density Tailored Waveform Modulator for Plasma Processing."

Jae-Sang Kim et al. (2024)

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DOI: 10.1109/TIE.2024.3363739

access: closed

type: Journal Article

metadata version: 2024-09-20

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Jae-Sang Kim, Jung-Kyu Han, Jaeho Kim, Gun-Woo Moon:
A New High-Power Density Tailored Waveform Modulator for Plasma Processing. IEEE Trans. Ind. Electron. 71(11): 13932-13942 (2024)

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