"Multidisciplinary Design Strategies for Turbomolecular Pumps With ..."

Ziyuan Huang, Bangcheng Han, Yun Le (2019)

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DOI: 10.1109/TIE.2019.2891440

access: closed

type: Journal Article

metadata version: 2020-05-22

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Ziyuan Huang, Bangcheng Han, Yun Le:
Multidisciplinary Design Strategies for Turbomolecular Pumps With Ultrahigh Vacuum Performance. IEEE Trans. Ind. Electron. 66(12): 9549-9558 (2019)

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