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"Robust Precision Position Detection With an Optical MEMS Hybrid Device."
Wilfried Hortschitz et al. (2012)
- Wilfried Hortschitz
, Harald Steiner, Matthias Sachse, Michael Stifter, Franz Kohl, Johannes Schalko, Artur Jachimowicz, Franz Keplinger
, Thilo Sauter
:
Robust Precision Position Detection With an Optical MEMS Hybrid Device. IEEE Trans. Ind. Electron. 59(12): 4855-4862 (2012)

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