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"A Flip-Chip Alignment System With the Property of Deviation ..."
Sifeng He et al. (2021)
- Sifeng He, Hui Tang, Kaifu Zhang, Chuangbin Chen, Jianglin Wang, Zhongyuan Zhu, Jian Gao, Chengqiang Cui, Xin Chen:
A Flip-Chip Alignment System With the Property of Deviation Self-Correction at the Nanoscale. IEEE Trans. Ind. Electron. 68(3): 2345-2355 (2021)
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