"SMA Microvalves for Very Large Gas Flow Control Manufactured Using ..."

Henrik Gradin et al. (2012)

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DOI: 10.1109/TIE.2011.2173892

access: closed

type: Journal Article

metadata version: 2020-05-22

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Henrik Gradin, Stefan Braun, Göran Stemme, Wouter van der Wijngaart:
SMA Microvalves for Very Large Gas Flow Control Manufactured Using Wafer-Level Eutectic Bonding. IEEE Trans. Ind. Electron. 59(12): 4895-4906 (2012)

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