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"Electrical Noise in MEMS Capacitive Elements Resulting From Environmental ..."

Robert Neal Dean et al. (2011)

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DOI: 10.1109/TIE.2010.2076310

access: closed

type: Journal Article

metadata version: 2020-05-22

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Robert Neal Dean, Abby Anderson, Stanley J. Reeves, George T. Flowers, Alan Scottedward Hodel:
Electrical Noise in MEMS Capacitive Elements Resulting From Environmental Mechanical Vibrations in Harsh Environments. IEEE Trans. Ind. Electron. 58(7): 2697-2705 (2011)

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