"A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS ..."

Jian Cui, Qiancheng Zhao (2022)

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DOI: 10.1109/TIE.2021.3127036

access: closed

type: Journal Article

metadata version: 2022-06-28

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Jian Cui, Qiancheng Zhao:
A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope With Off-Plane Coupling Suppression Silicon Gratings. IEEE Trans. Ind. Electron. 69(11): 11765-11773 (2022)

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