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"Design and implementation of capacitive proximity sensor using ..."

Zhenhai Chen, Ren C. Luo (1998)

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DOI: 10.1109/41.735332

access: closed

type: Journal Article

metadata version: 2020-05-22

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Zhenhai Chen, Ren C. Luo:
Design and implementation of capacitive proximity sensor using microelectromechanical systems technology. IEEE Trans. Ind. Electron. 45(6): 886-894 (1998)

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