"Adaptive Sliding-Mode Position Control for Piezo-Actuated Stage."

Xinkai Chen, Takeshi Hisayama (2008)

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DOI: 10.1109/TIE.2008.926768

access: closed

type: Journal Article

metadata version: 2022-12-07

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Xinkai Chen, Takeshi Hisayama:
Adaptive Sliding-Mode Position Control for Piezo-Actuated Stage. IEEE Trans. Ind. Electron. 55(11): 3927-3934 (2008)

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