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"Characterization of Dielectric Charging in MEMS Using Diffusive ..."

Maria-Teresa Atienza et al. (2017)

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DOI: 10.1109/TIE.2016.2612619

access: closed

type: Journal Article

metadata version: 2020-05-22

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Maria-Teresa Atienza, Sergi Gorreta, Joan Pons-Nin, Manuel Domínguez Pumar:
Characterization of Dielectric Charging in MEMS Using Diffusive Representation. IEEE Trans. Ind. Electron. 64(2): 1529-1533 (2017)

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