"Micromachined planar inductors on silicon wafers for MEMS applications."

Chong H. Ahn, Mark G. Allen (1998)

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DOI: 10.1109/41.735330

access: closed

type: Journal Article

metadata version: 2020-05-22

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Chong H. Ahn, Mark G. Allen:
Micromachined planar inductors on silicon wafers for MEMS applications. IEEE Trans. Ind. Electron. 45(6): 866-876 (1998)

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