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"A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts."
Maryam Jalali et al. (2012)
- Maryam Jalali, James J. Marti, Allison L. Kirchhoff, Frances Lawrenz, Stephen A. Campbell:
A Low-Cost Hands-On Laboratory to Introduce Lithography Concepts. IEEE Trans. Educ. 55(4): 517-524 (2012)
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