"The 18 mm Laboratory: Teaching MEMS Development With the SUMMiT Foundry ..."

Tim Dallas, Jordan M. Berg, Richard O. Gale (2012)

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DOI: 10.1109/TE.2012.2195182

access: closed

type: Journal Article

metadata version: 2020-04-16

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Tim Dallas, Jordan M. Berg, Richard O. Gale:
The 18 mm Laboratory: Teaching MEMS Development With the SUMMiT Foundry Process. IEEE Trans. Educ. 55(4): 529-537 (2012)

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