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"Sliding Mode Control of a Distributed-Parameter Wafer Spin Clean Process."
Stefan Koch et al. (2021)
- Stefan Koch, Martin Kleindienst, Jaime A. Moreno, Martin Horn:
Sliding Mode Control of a Distributed-Parameter Wafer Spin Clean Process. IEEE Trans. Control. Syst. Technol. 29(5): 2271-2278 (2021)
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