"Sliding Mode Control of a Distributed-Parameter Wafer Spin Clean Process."

Stefan Koch et al. (2021)

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DOI: 10.1109/TCST.2020.3028936

access: closed

type: Journal Article

metadata version: 2021-08-13

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Stefan Koch, Martin Kleindienst, Jaime A. Moreno, Martin Horn:
Sliding Mode Control of a Distributed-Parameter Wafer Spin Clean Process. IEEE Trans. Control. Syst. Technol. 29(5): 2271-2278 (2021)

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