"Structure Rotation and Pull-in Voltage Control of MEMS Lateral Comb ..."

Afshin Izadian, Lawrence A. Hornak, Parviz Famouri (2009)

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DOI: 10.1109/TCST.2008.922568

access: closed

type: Journal Article

metadata version: 2024-10-06

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Afshin Izadian, Lawrence A. Hornak, Parviz Famouri:
Structure Rotation and Pull-in Voltage Control of MEMS Lateral Comb Resonators Under Fault Conditions. IEEE Trans. Control. Syst. Technol. 17(1): 51-59 (2009)

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