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"Estimating relative deposition rates in a multi-source ..."

Matthew J. Hilt et al. (2006)

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DOI: 10.1109/TCST.2005.863651

access: closed

type: Journal Article

metadata version: 2020-06-08

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Matthew J. Hilt, Tyrone L. Vincent, Bharat S. Joshi, Lin J. Simpson:
Estimating relative deposition rates in a multi-source continuous-deposition process using a single composition sensor. IEEE Trans. Control. Syst. Technol. 14(2): 247-259 (2006)

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