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"Control of a III-V MOCVD process using ultraviolet absorption and ..."

M. Gaffney Flynn et al. (2001)

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DOI: 10.1109/87.944468

access: closed

type: Journal Article

metadata version: 2020-12-29

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M. Gaffney Flynn, Roy S. Smith, Patrick Abraham, Steven P. DenBaars:
Control of a III-V MOCVD process using ultraviolet absorption and ultrasonic concentration monitoring. IEEE Trans. Control. Syst. Technol. 9(5): 728-740 (2001)

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