"Monolithic Resonant-Cantilever-Based CMOS Microsystem for Biochemical Sensing."

Yue Li et al. (2008)

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DOI: 10.1109/TCSI.2008.922027

access: closed

type: Journal Article

metadata version: 2020-05-22

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Yue Li, Cyril Vancura, Kay-Uwe Kirstein, Jan Lichtenberg, Andreas Hierlemann:
Monolithic Resonant-Cantilever-Based CMOS Microsystem for Biochemical Sensing. IEEE Trans. Circuits Syst. I Regul. Pap. 55-I(9): 2551-2560 (2008)

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