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"Massively parallel electromagnetic simulation for photolithographic ..."

Alfred Kwok Kit Wong, Roberto Guerrieri, Andrew R. Neureuther (1995)

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DOI: 10.1109/43.466339

access: closed

type: Journal Article

metadata version: 2020-09-24

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Alfred Kwok Kit Wong, Roberto Guerrieri, Andrew R. Neureuther:
Massively parallel electromagnetic simulation for photolithographic applications. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 14(10): 1231-1240 (1995)

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