"Emerging simulation approaches for micromachined devices."

Tamal Mukherjee et al. (2000)

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DOI: 10.1109/43.898833

access: closed

type: Journal Article

metadata version: 2023-09-30

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Tamal Mukherjee, Gary K. Fedder, Deepak Ramaswamy, Jacob K. White:
Emerging simulation approaches for micromachined devices. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 19(12): 1572-1589 (2000)

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