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"Three-Dimensional Monte Carlo Simulations--Part I: Implanted Profiles for ..."

A. M. Mazzone, G. Rocca (1984)

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DOI: 10.1109/TCAD.1984.1270058

access: closed

type: Journal Article

metadata version: 2020-09-24

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A. M. Mazzone, G. Rocca:
Three-Dimensional Monte Carlo Simulations--Part I: Implanted Profiles for Dopants in Submicron Device. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 3(1): 64-71 (1984)

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