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"Overlay-Aware Detailed Routing for Self-Aligned Double Patterning ..."

Iou-Jen Liu, Shao-Yun Fang, Yao-Wen Chang (2016)

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DOI: 10.1109/TCAD.2015.2513670

access: closed

type: Journal Article

metadata version: 2020-09-24

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Iou-Jen Liu, Shao-Yun Fang, Yao-Wen Chang:
Overlay-Aware Detailed Routing for Self-Aligned Double Patterning Lithography Using the Cut Process. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 35(9): 1519-1531 (2016)

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