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"Design of CMOS MEMS based on mechanical resonators using a RF simulation ..."

Laurent Latorre, Vincent Beroulle, Pascal Nouet (2004)

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DOI: 10.1109/TCAD.2004.828113

access: closed

type: Journal Article

metadata version: 2020-09-24

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Laurent Latorre, Vincent Beroulle, Pascal Nouet:
Design of CMOS MEMS based on mechanical resonators using a RF simulation approach. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 23(6): 962-967 (2004)

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