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"Design-Aware Mask Inspection."
Abde Ali Kagalwalla et al. (2012)
- Abde Ali Kagalwalla, Puneet Gupta
, Christopher J. Progler, Steve McDonald:
Design-Aware Mask Inspection. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 31(5): 690-702 (2012)
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