"An analytic Volterra-series-based model for a MEMS variable capacitor."

Manuel Innocent et al. (2003)

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DOI: 10.1109/TCAD.2002.806603

access: closed

type: Journal Article

metadata version: 2020-09-24

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Manuel Innocent, Piet Wambacq, Stéphane Donnay, Harrie A. C. Tilmans, Willy M. C. Sansen, Hugo De Man:
An analytic Volterra-series-based model for a MEMS variable capacitor. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 22(2): 124-131 (2003)

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