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"A ULSI 2-D capacitance simulator for complex structures based on actual ..."

Sanae Fukuda et al. (1990)

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DOI: 10.1109/43.45855

access: closed

type: Journal Article

metadata version: 2020-09-24

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Sanae Fukuda, Naoyuki Shigyo, Koichi Kato, Shin Nakamura:
A ULSI 2-D capacitance simulator for complex structures based on actual processes. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 9(1): 39-47 (1990)

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