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"Inclusion of Chemical-Mechanical Polishing Variation in Statistical Static ..."

Eric A. Foreman et al. (2011)

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DOI: 10.1109/TCAD.2011.2162066

access: closed

type: Journal Article

metadata version: 2020-09-24

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Eric A. Foreman, Peter A. Habitz, Ming-C. Cheng, Christino Tamon:
Inclusion of Chemical-Mechanical Polishing Variation in Statistical Static Timing Analysis. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 30(11): 1758-1762 (2011)

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