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"Diagnosis of Optical Lithography Faults With Product Test Sets."

Munkang Choi, Linda S. Milor (2008)

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DOI: 10.1109/TCAD.2008.927672

access: closed

type: Journal Article

metadata version: 2022-01-03

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Munkang Choi, Linda S. Milor:
Diagnosis of Optical Lithography Faults With Product Test Sets. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 27(9): 1657-1669 (2008)

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