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"Simultaneous EUV Flare Variation Minimization and CMP Control by ..."
Hui-Ju Katherine Chiang et al. (2016)
- Hui-Ju Katherine Chiang, Chi-Yuan Liu, Jie-Hong R. Jiang, Yao-Wen Chang:
Simultaneous EUV Flare Variation Minimization and CMP Control by Coupling-Aware Dummification. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 35(4): 598-610 (2016)
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