"Rigorous integration of semiconductor process and device simulators."

Thomas Binder, Andreas Hössinger, Siegfried Selberherr (2003)

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DOI: 10.1109/TCAD.2003.816219

access: closed

type: Journal Article

metadata version: 2020-09-24

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Thomas Binder, Andreas Hössinger, Siegfried Selberherr:
Rigorous integration of semiconductor process and device simulators. IEEE Trans. Comput. Aided Des. Integr. Circuits Syst. 22(9): 1204-1214 (2003)

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