"A high-yield fabrication process for silicon neural probes."

Seung Jae Oh et al. (2006)

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DOI: 10.1109/TBME.2005.862568

access: closed

type: Journal Article

metadata version: 2020-09-02

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Seung Jae Oh, Jong Keun Song, Jin Won Kim, Sung Jun Kim:
A high-yield fabrication process for silicon neural probes. IEEE Trans. Biomed. Eng. 53(2): 351-354 (2006)

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