"Efficient Scheduling of Residency-Time-Constrained Dual-Armed Cluster ..."

Lu Zhen et al. (2025)

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DOI: 10.1109/TASE.2024.3414843

access: closed

type: Journal Article

metadata version: 2025-03-07

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Lu Zhen, BinQi Zhang, FaJun Yang, MengChu Zhou:
Efficient Scheduling of Residency-Time-Constrained Dual-Armed Cluster Tools With Condition-Based Chamber Cleaning Operations. IEEE Trans Autom. Sci. Eng. 22: 5000-5011 (2025)

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