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"Design and Development of a Flexure-Based Dual-Stage Nanopositioning ..."

Qingsong Xu (2012)

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DOI: 10.1109/TASE.2012.2198918

access: closed

type: Journal Article

metadata version: 2020-04-02

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Qingsong Xu:
Design and Development of a Flexure-Based Dual-Stage Nanopositioning System With Minimum Interference Behavior. IEEE Trans Autom. Sci. Eng. 9(3): 554-563 (2012)

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