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"Petri Net-Based Scheduling of Single-Arm Cluster Tools With Reentrant ..."

Naiqi Wu et al. (2011)

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DOI: 10.1109/TASE.2010.2046736

access: closed

type: Journal Article

metadata version: 2023-01-30

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Naiqi Wu, Feng Chu, Chengbin Chu, Mengchu Zhou:
Petri Net-Based Scheduling of Single-Arm Cluster Tools With Reentrant Atomic Layer Deposition Processes. IEEE Trans Autom. Sci. Eng. 8(1): 42-55 (2011)

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