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"Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances ..."

ChunRong Pan et al. (2018)

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DOI: 10.1109/TASE.2016.2642997

access: closed

type: Journal Article

metadata version: 2020-04-02

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ChunRong Pan, MengChu Zhou, Yan Qiao, Naiqi Wu:
Scheduling Cluster Tools in Semiconductor Manufacturing: Recent Advances and Challenges. IEEE Trans Autom. Sci. Eng. 15(2): 586-601 (2018)

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