"A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning ..."

Yangmin Li, Qingsong Xu (2011)

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DOI: 10.1109/TASE.2010.2077675

access: closed

type: Journal Article

metadata version: 2020-06-10

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Yangmin Li, Qingsong Xu:
A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation. IEEE Trans Autom. Sci. Eng. 8(2): 265-279 (2011)

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