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"Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With ..."
Dae-Kyu Kim, Tae-Eog Lee, Hyun-Jung Kim (2016)
- Dae-Kyu Kim, Tae-Eog Lee
, Hyun-Jung Kim:
Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With Parallel Chambers. IEEE Trans Autom. Sci. Eng. 13(2): 1165-1175 (2016)
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