"Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With ..."

Dae-Kyu Kim, Tae-Eog Lee, Hyun-Jung Kim (2016)

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DOI: 10.1109/TASE.2015.2443107

access: closed

type: Journal Article

metadata version: 2020-04-02

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Dae-Kyu Kim, Tae-Eog Lee, Hyun-Jung Kim:
Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With Parallel Chambers. IEEE Trans Autom. Sci. Eng. 13(2): 1165-1175 (2016)

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