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"Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster ..."
Hyun-Jung Kim, Jun-Ho Lee (2019)
- Hyun-Jung Kim
, Jun-Ho Lee
:
Closed-Form Expressions on Lot Completion Time for Dual-Armed Cluster Tools With Parallel Processing Modules. IEEE Trans Autom. Sci. Eng. 16(2): 898-907 (2019)
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