"Feedback Control of Cluster Tools for Regulating Wafer Delays."

Chulhan Kim, Tae-Eog Lee (2016)

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DOI: 10.1109/TASE.2015.2404921

access: closed

type: Journal Article

metadata version: 2020-04-02

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Chulhan Kim, Tae-Eog Lee:
Feedback Control of Cluster Tools for Regulating Wafer Delays. IEEE Trans Autom. Sci. Eng. 13(2): 1189-1199 (2016)

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