"Automated CAD/CAM-based nanolithography using a custom atomic force ..."

Matthew S. Johannes et al. (2006)

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DOI: 10.1109/TASE.2006.875535

access: closed

type: Journal Article

metadata version: 2024-10-06

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Matthew S. Johannes, Jonathan F. Kuniholm, Daniel G. Cole, Robert L. Clark:
Automated CAD/CAM-based nanolithography using a custom atomic force microscope. IEEE Trans Autom. Sci. Eng. 3(3): 236-239 (2006)

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