"An Experimental Design for Processing Parameter Optimization for Cathode ..."

Shuo-Fu Hsu et al. (2016)

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DOI: 10.1109/TASE.2016.2572223

access: closed

type: Journal Article

metadata version: 2020-04-02

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  - https://dblp.org/rec/journals/tase/HsuWYFC16
Shuo-Fu Hsu, Min-Hang Weng, Ru-Yuan Yang, Chun-Hsiung Fang, Jyh-Horng Chou:
An Experimental Design for Processing Parameter Optimization for Cathode Arc Plasma Deposition of ZnO Films. IEEE Trans Autom. Sci. Eng. 13(4): 1588-1593 (2016)

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