"Key Feature Identification for Monitoring Wafer-to-Wafer Variation in ..."

Shu-Kai S. Fan et al. (2022)

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DOI: 10.1109/TASE.2022.3141426

access: closed

type: Journal Article

metadata version: 2022-07-25

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Shu-Kai S. Fan, Chia-Yu Hsu, Du-Ming Tsai, Mabel C. Chou, Chih-Hung Jen, Jen-Hsuan Tsou:
Key Feature Identification for Monitoring Wafer-to-Wafer Variation in Semiconductor Manufacturing. IEEE Trans Autom. Sci. Eng. 19(3): 1530-1541 (2022)

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