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"Kinodynamic Generation of Wafer Scanners Trajectories Used in ..."

Yazan Mohammad Al-Rawashdeh, Mohammad Al Janaideh, Marcel François Heertjes (2023)

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DOI: 10.1109/TASE.2022.3196318

access: closed

type: Journal Article

metadata version: 2023-01-31

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  - journals/tase/Al-RawashdehJH23
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  - https://dblp.org/rec/journals/tase/Al-RawashdehJH23
Yazan Mohammad Al-Rawashdeh, Mohammad Al Janaideh, Marcel François Heertjes:
Kinodynamic Generation of Wafer Scanners Trajectories Used in Semiconductor Manufacturing. IEEE Trans Autom. Sci. Eng. 20(1): 718-732 (2023)

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