Stop the war!

Остановите войну!

for scientists:

default search action

combined dblp search
author search
venue search
publication search

ask others

"Effect of Plasma Oxygen Content on the Size and Content of Silicon ..."

Vladimir A. Terekhov et al. (2023)

> Home

Details and statistics

DOI: 10.3390/SYM15091800

access: open

type: Journal Article

metadata version: 2024-01-26

- view
  - electronic edition via DOI (open access)
  authority control:
- export record
  dblp key:
  - journals/symmetry/TerekhovTUBKINSGMPLT23
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/symmetry/TerekhovTUBKINSGMPLT23
Vladimir A. Terekhov, Evgeniy I. Terukov, Yurii K. Undalov, Konstantin A. Barkov, Nikolay A. Kurilo, Sergey A. Ivkov, Dmitry N. Nesterov, Pavel Seredin, Dmitry Goloshchapov, Dmitry Minakov, Elena V. Popova, Anatoly N. Lukin, Irina N. Trapeznikova:
Effect of Plasma Oxygen Content on the Size and Content of Silicon Nanoclusters in Amorphous SiOx Films Obtained with Plasma-Enhanced Chemical Vapor Deposition. Symmetry 15(9): 1800 (2023)

a service of

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.