"A Composite Linear Active Disturbance Rejection Control-Sliding Mode ..."

Huairong Chen et al. (2025)

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DOI: 10.3390/SYM17050636

access: open

type: Journal Article

metadata version: 2025-09-29

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Huairong Chen, Yonghong Zhang, Wen Li, Xiang Zhang, Weiming Liang:
A Composite Linear Active Disturbance Rejection Control-Sliding Mode Control Strategy with Nominal Model Compensation for Precision Motion Tracking in Semiconductor Die Attach Machines. Symmetry 17(5): 636 (2025)

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