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"LineDiff Entropy: Lossless Layout Data Compression Scheme for Maskless ..."

Chin-Khai Tang, Ming-Shing Su, Yi-Chang Lu (2013)

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DOI: 10.1109/LSP.2013.2261493

access: closed

type: Journal Article

metadata version: 2017-06-14

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Chin-Khai Tang, Ming-Shing Su, Yi-Chang Lu:
LineDiff Entropy: Lossless Layout Data Compression Scheme for Maskless Lithography Systems. IEEE Signal Process. Lett. 20(7): 645-648 (2013)

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