"Model Development for Atomic Force Microscope Stage Mechanisms."

Ralph C. Smith et al. (2006)

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DOI: 10.1137/05063307X

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type: Journal Article

metadata version: 2021-10-14

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Ralph C. Smith, Andrew G. Hatch, Tathagata De, Murti V. Salapaka, Ricardo C. H. del Rosario, Julie K. Raye:
Model Development for Atomic Force Microscope Stage Mechanisms. SIAM J. Appl. Math. 66(6): 1998-2026 (2006)

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